The Characteristics of Columniform Surface Wave Plasma Excited Around a Quartz Rod by 2.45 GHz Microwaves

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    摘要 Anovelsurfacewaveplasma(SWP)sourceexcitedwithcylindricalTeflonwaveguidehasbeendevelopedinourpreviouswork.Theplasmacharacteristicshavebeensimplystudied.Inthiswork,ourexperimentaldevicehasbeensignificantlyimprovedbyreplacingtheTeflonwaveguidewithaquartzrod,andthenbettermicrowavecouplingandhighergaspuritycanbeobtainedduringplasmadischarge.Theplasmaspatialdistributions,bothinradialandaxialdirections,havebeenmeasuredandtheeffectofgaspressurehasbeeninvestigated.Plasmadensityprofilesindicatethatthisplasmasourcecanproduceuniformplasmainanaxialdirectionatlowpressure,whichshowsitspotentialinplasmaprocessingonacurvedsurfacesuchasaninnertubewall.Asimplifiedcircularwaveguidemodelhasbeenusedtoexplaintheprincipleofplasmaexcitation.Thedistinguishingfeaturesandpotentialapplicationofthiskindofplasmasourcewithahardwareimprovementhavebeenshown.
    机构地区 不详
    出版日期 2016年10月20日(中国Betway体育网页登陆平台首次上网日期,不代表论文的发表时间)
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