摘要
Anovelsurfacewaveplasma(SWP)sourceexcitedwithcylindricalTeflonwaveguidehasbeendevelopedinourpreviouswork.Theplasmacharacteristicshavebeensimplystudied.Inthiswork,ourexperimentaldevicehasbeensignificantlyimprovedbyreplacingtheTeflonwaveguidewithaquartzrod,andthenbettermicrowavecouplingandhighergaspuritycanbeobtainedduringplasmadischarge.Theplasmaspatialdistributions,bothinradialandaxialdirections,havebeenmeasuredandtheeffectofgaspressurehasbeeninvestigated.Plasmadensityprofilesindicatethatthisplasmasourcecanproduceuniformplasmainanaxialdirectionatlowpressure,whichshowsitspotentialinplasmaprocessingonacurvedsurfacesuchasaninnertubewall.Asimplifiedcircularwaveguidemodelhasbeenusedtoexplaintheprincipleofplasmaexcitation.Thedistinguishingfeaturesandpotentialapplicationofthiskindofplasmasourcewithahardwareimprovementhavebeenshown.
出版日期
2016年10月20日(中国Betway体育网页登陆平台首次上网日期,不代表论文的发表时间)