Microcrystalline Silicon Materials and Solar Cells Prepared by VHF-PECVD-中国Betway体育网页登陆

摘要 AseriesofsamplesdepositedbyVHF-PECVDatdifferentpressureswerestudied.Themeasurementresultsofphotosensitivity(photoconductivity/darkconductivity)andactivationenergyindicatednearthesamerulewiththechangeofthepressure.TheresultsmeasuredbyRamanscatteringspectra,X-raydiffractionandFTIRallprovedtheevidentcrystallizationofthematerials.Treatingthep/iinterfacebyhydrogenhasagreatimprovingeffectontheperformanceofthemicrocrystallinesilicon(μc-Si)p-i-nsolarcellsifthetreatmenttimewasappropriate.Anefficiencyof4.24%forμc-Sip-i-nsolarcellsdepositedbyVHF-PECVDwasfirstlyobtained.

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Microcrystalline Silicon Materials and Solar Cells Prepared by VHF-PECVD

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