Space-and time-resolved diagnostics of the ENEA EUV discharge-produced-plasma source used for metrology and other applications-中国Betway体育网页登陆

摘要 Adischarge-produced-plasma(DPP)sourceemittingintheextremeultraviolet(EUV)spectralregionisrunningattheENEAFrascatiResearchCentre.Theplasmaisgeneratedinlow-pressurexenongasandefficientlyemits100-nsdurationradiationpulsesinthe10–20-nmwavelengthrange,withanenergyof20mJ/shot/srata10-Hzrepetitionrate.Thecomplexdischargeevolutionisconstantlyexaminedandcontrolledwithelectricalmeasurements,whileansgatedCCDcameraallowedobservationofthedischargedevelopmentinthevisible,detectionoftime-resolvedplasmacolumnpinching,andoptimizationofthepre-ionizationtiming.AccuratelycalibratedZr-filteredPINdiodesareusedtomonitorthetemporalbehaviourandenergyemissionoftheEUVpulses,whilethecalibrationofadosimetricfilmallowsquantitativeimagingoftheemittedradiation.Thiscomprehensiveplasmadiagnosticshasdemonstrateditseffectivenessinsuitablyadjustingthesourceconfigurationforseveralapplications,suchasexposuresofphotonicmaterialsandinnovativephotoresists.

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Space-and time-resolved diagnostics of the ENEA EUV discharge-produced-plasma source used for metrology and other applications

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