摘要
Toestablishthemechanismofsurfacechangeinacontinuouspolishingsystem,anidealmathematicalmodelisbuiltbasedonWinkler’shypothesisandthePrestonequation.Thebasicfeaturesofthemodelarethechangeratesinthesurfacepeak–valley(PV)valuesoftheworkpiece,conditioningdiskandpitchlap,ratherthanthespecificsurfaceshapes.Inaddition,anequilibriumstateexistsinthesystem,indicatingthatthesurfacechangeratesareallzero.Underequilibrium,thesurfaceofthelapcouldremainflat,anditisinsensitivetothesurfaceerroroftheworkpiece.Thesecharacteristicslaythetheoreticalfoundationsforhigh-efficiencyandhigh-precisionpolishing.Themethodstoobtainanequilibriumstatewithflatsurfacesarethenproposedandconfirmedexperimentally.High-precisionsurfacesbetterthanλ/10(λ=632.8nm)areconsistentlyproducedexperimentally.
出版日期
2015年02月12日（中国Betway体育网页登陆平台首次上网日期，不代表论文的发表时间）
