EUV ablation of organic polymers at a high fluence-中国Betway体育网页登陆

摘要 Apreliminaryinvestigationonshort-wavelengthablationmechanismsofpoly(methylmethacrylate)(PMMA)andpoly(1,4-phenyleneetherether-sulfone)(PPEES)byextremeultraviolet(EUV)radiationat13.5nmusingatable-toplaserproducedplasmafromagas-pufftargetatLLG(Gttingen)andat46.9nmbya10HzdesktopcapillarydischargelaseroperatedattheInstituteofPhysics(Prague)ispresented.Ablationofpolymermaterialsisinitiatedbyphotoinducedpolymerchainscissions.TheablationoccursduetotheformationofvolatileproductsbytheEUVradiolysisremovedasanablationplumefromtheirradiatedmaterialintothevacuum.Ingeneral,cross-linkingofpolymermoleculescancompetewiththechaindecomposition.Bothprocessesmayinfluencetheefficiencyandqualityofmicro(nano)structuringinpolymermaterials.WavelengthisacriticalparametertobetakenintoaccountwhenanEUVablationprocessoccurs,becausedifferentwavelengthsresultindifferentenergydensitiesinthenear-surfaceregionofthepolymerexposedtonanosecondpulsesofintenseEUVradiation.

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EUV ablation of organic polymers at a high fluence

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