Post-fabrication phase trimming of Mach–Zehnder interferometers by laser annealing of germanium implanted waveguides-中国Betway体育网页登陆

摘要 Wedemonstrateanovelhigh-accuracypost-fabricationtrimmingtechniquetofine-tunethephaseofintegratedMach–Zehnderinterferometers,enablingpermanentcorrectionoftypicalfabrication-basedphaseerrors.Theeffectiveindexchangeoftheopticalmodeis0.19inourmeasurement,whichisapproximatelyanorderofmagnitudeimprovementcomparedtopreviousworkwithsimilarexcessopticalloss.Ourmeasurementresultssuggestthataphaseaccuracyof0.078radwasachievablewithactivefeedbackcontrol.

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Post-fabrication phase trimming of Mach–Zehnder interferometers by laser annealing of germanium implanted waveguides

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