High-Q silica microdisk optical resonators with large wedge angles on a silicon chip-中国Betway体育网页登陆

摘要 Weexperimentallydemonstratehighopticalqualityfactorsilicamicrodiskresonatorsonasiliconchipwithlargewedgeanglesbyreactiveionetching.For2-μm-thickmicroresonators,wehaveachievedwedgeanglesof59°,63°,70°,and79°withopticalqualityfactorsof2.4×10~7,8.1×10~6,5.9×10~6,and7.4×10~6,respectively,from～80μmdiametermicroresonatorsinthe1550nmwavelengthband.Also,for1-μm-thickmicroresonators,wehaveobtainedanopticalqualityfactorof7.3×10~6withawedgeangleof74°.

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High-Q silica microdisk optical resonators with large wedge angles on a silicon chip

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