Characterization of the Diamond—like Carbon based Functionally Gradient Film-中国Betway体育网页登陆

摘要 Diamond-likecarboncoatingshavebeenusedassolidlubricatingcoatingsinvacuumtechnologyfortheirgoodphysicalandchemicalproperties.Inthispaper,thehybridtechniqueofunbalancedmagnetronsputteringandplasmaimmersionionimplantation(PIll)wasadoptedtofabricatediamond-likecarbon-basedfunctionallygradientfilm,N/TiN/Ti(N,C)/DLC,onthe304stainlesssteelsubstrate.ThefilmwascharacterizedbyusingRamanspectroscopyandglancingX-raydiffraction(GXRD),andthetopographyandsurfaceroughnessofthefilmwasobservedusingAFM.Themechanicalpropertiesofthefilmwereevaluatedbynano-indentation.Theresultsshowedthatthesurfaceroughnessofthefilmwasapproximately0.732nm.Thehardnessandelasticmodulus,fracturetoughnessandinterfacialfracturetoughnessofN/TiN/Ti(N,C)/DLCfunctionallygradientfilmwereabout19.84GPa,190.03GPa,3.75MPa.m1/2and5.68MPa@m1/2,respectively.ComparedwiththatofDLCmonolayerandC/TiC/DLCmultilayer,thisDLCgradientfilmhasbetterqualitiesasasolidlubricatingcoating.

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Characterization of the Diamond—like Carbon based Functionally Gradient Film

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