A Method for Preparation of Ordered Porous Silicon Based on a 2D SiO2 Template-中国Betway体育网页登陆

摘要 Anewmethodforfabricatingorderedporoussiliconisreported.Atwo-dimensionalsilicananospherearrayisusedasatemplatewithahydrofluoricacid-hydrogenperoxidesolutionforetchingthenanospheres.Theinitialdiameteranddistributionoftheholesintheresultingporoussiliconlayeraredeterminedbythesizeanddistributionofthesilicananospheres.Thecorrosiontimecanbeusedtocontrolthedepthsoftheholes.ItisfoundthatthepresenceofaSiO_2layer,formedbytheoxidationoftheroughinternalsurfaceofthehole,istheprimaryreasonallowingthecorrosiontoproceed.Ultravioletreflectionandthermalconductivitymeasurementsshowthatthediameteranddistributionoftheholeshaveagreatinfluenceonpropertiesoftheporoussilicon.

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A Method for Preparation of Ordered Porous Silicon Based on a 2D SiO2 Template

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