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Study of SiO2 Films Prepared by Electron Cyclotron Resonant Microwave Plasma

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DOI 34g88gp3j9/1044055

作者张劲松;任兆杏;梁荣庆;隋毅峰;刘卫

机构地区不详

出处《等离子体科学与技术：英文版》 2000年2期

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分类 [核科学技术][核技术及应用]

出版日期 2000年02月12日（中国Betway体育网页登陆平台首次上网日期，不代表论文的发表时间）

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等离子体科学与技术：英文版

等离子体科学与技术：英文版

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